Application of existing MEMS Technology in the MEMS Device Design by means of MEMS Xplorer and SKILL

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SKILL is not an acronym, it is a name. SKILL was originally based of Lisp called “Franz Lisp” created at UC Berkeley by students of Professor Richard J. Fateman. SKILL is used as a scripting language as well as a description language for PCells which
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   International Journal of Research in Engineering and Science (IJRES)  ISSN (Online): 2320-9364, ISSN (Print): 2320-9356 www.ijres.org Volume 2 Issue 7 ǁ Ju ly . 2014 ǁ PP. 01-07   www.ijres.org 1 | Page   Application of existing MEMS Technology in the MEMS Device Design by means of MEMS Xplorer and SKILL   Nikolay Delibozov 1 Vladimir Stavrov 2   1 (Microelectronics, Technical University of Sofia, Bulgaria)   2 (AMG Technology Ltd., Industrial Zone Microelectronica, Botevgrad, Bulgaria)   ABSTRACT   : SKILL is not an acronym, it is a name. SKILL was srcinally based of Lisp called “Franz  Lisp” created at UC Berkeley by students of Professor Richard J. Fateman. SKILL is used as a scripting language as well as a description language for PCells which are used in many EDA software suites by Cadence  Design Systems (for example Cadence Allegro and Cadence Virtuoso). A parameterized cell or PCell is a  graphic, programmable cell that lets to be created a customized instance each time when it is placed. The created PCell is called a master. The master PCell is compiled and stored in the database in the form of SKILL  procedure. MEMS Xplorer is fully integrated in the Cadence Virtuoso design platform. Combined with the Cadence Custom IC Tool suite MEMS Xplorer creates a very powerful and robust solution for both MEMS and  IC design.   Keywords  –    design; library; MEMS; SKILL; technology I.   INTRODUCTION In this paper is presented the use of SKILL language in order to design a MEMS device. MEMS devices can be presented with multi-physics signals in mechanical, thermal, magnetic, fluidic, optical, and electrostatic domains in Verilog-A. MEMS devices are designed by MEMS Xplorer DS which provides a set of libraries containing 34 components from which complete MEMS devices can be built [1]. Any of the supplied devices can be adapted to user-defined technology as well as can be built brand new devices in the user-defined technology. In order to create a new user-defined technology is used SKILL description language. SKILL is a Lisp dialect used as a scripting language as well as a description language for PCells which are used in many EDA software suites by Cadence Design Systems (e.g. Cadence Allegro and Cadence Virtuoso). SKILL is  based on Lisp called “Franz Lisp” created at UC Berkeley by the students of Professor Richard J. Fateman. Historically, SKILL was known as IL. SKILL was a library of IL functions. A parameterized cell or PCell is a graphic, programmable cell that lets to be created a customized instance each time when it is placed. This cell is created just as creation of any other layout cell, and then necessary parameters are assigned to it. The created PCell is called a master. A master is the combination of the drawn graphic layout to make a cell and the assigned parameters to it. After compiling of the master PCell, it has to be stored in the database in the form of a SKILL procedure. When an instance of a PCell is placed, the defaults can be accepted or any of the values for the assigned parameters can be changed. Using the default values creates an instance identical to the master cellview. II.   MEMS   D EVICE C REATION AND C USTOMIZATION   MEMS devices can be designed by MEMS Xplorer within Virtuoso. MEMS physical design can also be created within the Cadence tool. MEMS Xplorer combined with the Cadence Custom IC Tool suite creates a very powerful and robust solution for both MEMS and IC design. The MEMS Xplorer modules are completely integrated in the Cadence environment making it very easy to learn and use. Functionalities include mixed MEMS/IC schematic capture and simulation, full custom mask layout capability and verification, 3D model generation and visualization, behavioral model creation and links to 3D analysis packages. MEMS Xplorer DS  provides a set of libraries containing 34 components each of them with own PCell. In order to create a new component has to be created new technology and new process located in new technology directory Fig. 1. Figure.1:New technology  –   directory structure.   Application of existing MEMS Technology in the MEMS Device Design by means of MEMS Xplorer www.ijres.org 2 | Page  A technology file then must be created describing the used layers, DRC rules, etc. The technology file is described using SKILL description language. In order to create new technology has to be created a foundry module called with the name of the new foundry. New foundry has to contain new process. New process contains a “technoLib” directory which defines new technology. “technoLib” directory should contain a binary file named “techfile.cds” which is so called technology file. All parameters files of   the new devices are saved under “NewProcess/config/devgen” directory. Any of the supplied device generators can be adapted to user  -defined technology. The adaptation of a device generator to a user-defined technology follows two steps:    Customization of the parameters file for each desired device generator.    Creation of the PCells inside the MEMS Xplorer DS environment. The parameter file of a device generator is a text file containing all its necessary variable declaration. The adaptation of a device generator only consists in modifying the declared variables values. Generally the layers will be affected. III.   U SES OF PC ELL   A parameterized cell or PCell is a graphic, programmable cell that lets to be created a customized instance each time when it is placed [2]. This cell is created just as creation of any other layout cell, and then necessary  parameters are assigned to it. When an instance of a PCell is placed, the defaults can be accepted or any of the values for the assigned parameters can be changed. The Virtuoso layout editor treats instances of PCells just like it treats instances of all other predefined cells. An instance of a PCell is almost identical to an instance of any other cellview to all applications that use the Cadence Design Framework II database. Finally, complete content and organizational editing before formatting. When proofreading spelling and grammar must be addressed the following items: Advantages in using a PCell PCells are used to:    Speed up entering layout data by eliminating the need to create duplicate version of the same functional  part.    Save disk space by creating a library of cells for similar parts that are all linked to the same source.    Eliminate errors that can result in maintaining multiple versions of the same cell.    Eliminate the need to explode levels of hierarchy when a small detail of a design is changed. IV.   I NITIALIZATION F ILES   In the working directory, the “.cdsinit_custom” file is created and modified Fig. 2. When PCells section appears with sets of created device generators library and list the loading instruction so that Cadence correctly evaluates the customized PCells, a new session for this new technology could be launched.   Application of existing MEMS Technology in the MEMS Device Design by means of MEMS Xplorer www.ijres.org 3 | Page   Figure.2:“.cdsinit_custom” file.     Application of existing MEMS Technology in the MEMS Device Design by means of MEMS Xplorer www.ijres.org 4 | Page   The “.cdsinit_custom” file contains user customization and details of PCells as well as “process.var”, ”3DModel.var”, ”XS_layers.var”, and ”diagr.var” parameters initialization files ( Figs. 3, 4, 5, and 6). These files are used when a new MEMS device is created and when simulations with the new device is made. Figure.3:“diagr.var” file.     Application of existing MEMS Technology in the MEMS Device Design by means of MEMS Xplorer www.ijres.org 5 | Page   Figure.4:“3DModel.var” file.   Figure.5:“process.var” file.  
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